منابع مشابه
Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE)
In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate ...
متن کاملAccurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...
متن کاملHydroelastic Vibration of a Circular Diaphragm in the Fluid Chamber of a Reciprocating Micro Pump
Reciprocating diaphragm micro-pumps are the most common type among indirectly–driven micro-pumps. They operate by reciprocating the diaphragm with associated check valves. This paper addresses the Hydroelastic vibration of circular elastic diaphragm interacting with the incompressible and inviscid liquid inside the cylindrical chamber with a central discharge opening. Taking into account axisym...
متن کاملImplementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate
This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, ...
متن کاملFabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses
This paper reports a new approach to the fabrication of 3D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. The fabrication process has been applied to a 1 mm × 2 mm × 1.2 μm diaphragm designed for a biomimetic directional microphone. The membrane has two 200 μm × 380 μm × 20 μm silicon proof m...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Bulletin of JSME
سال: 1958
ISSN: 0021-3764,1881-1426
DOI: 10.1299/jsme1958.1.215